Presentations -
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Electrical characteristics of high power pulsed magnetron sputtering system
Takashi Kimura, Toshihiko Mishima
Event date： 2017.01
Language：English Presentation type：Poster presentation
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Surface Modification of DLC Films by Plasma Based Nitrogen Ion Implantation Method
H. Yanai, T. Kimura, S. Nakao and K. Azuma
Material research society of Japan
Event date： 2016.12
Language：English Presentation type：Poster presentation
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Preparation of Conductive DLC Films by High Power Pulsed Magnetron Sputtering Combined with Plasma Based Ion Implantation System
T. Kimura, H. Kamata, S. Nakao and K. Azuma
Material research society of Japan
Event date： 2016.12
Language：English Presentation type：Poster presentation
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The deposition of Titanium Nitride thin film using a high-power pulse Penning sputtering under the Argon/Nitrogen mixture gas atmosphere International conference
Y. Kusuhashi, K. Azuma, T. Kimura
Joint Symposium of 9th Asia-Pacific SYmposium on the Basics and Applications of Plasma Technology and 28th Symposium on Plasma Science for Materials
Event date： 2015.12
Language：English Presentation type：Poster presentation
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Formation of hydrogenated amorphous carbon films by reactive high power impulse magnetron sputtering containing C2H2 gas International conference
Takashi Kimura, Hikaru Kamata
9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing/68th Gaseous Electronics Conference
Event date： 2015.10
Language：English Presentation type：Oral presentation (general)
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Preparation of hydrogenated diamond-like carbon films by reactive Ar/CH4 high power impulse magnetron sputtering with negative pulse voltage International conference
Takashi Kimura, Hikaru Kamata
9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing/68th Gaseous Electronics Conference
Event date： 2015.10
Language：English Presentation type：Poster presentation
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Conductive DLC films prepared by high power pulsed magnetron sputtering with bipolar pulse voltage source for substrate International conference
Takashi Kimura, Taku Suyama, Kingo Azuma, Setsuo Nakao, Tsutomu Sonoda, Takeshi Kusumori, Kimihiro Ozaki
The10th Asian-European International Conference on Plasma Surface Engineering
Event date： 2015.09
Language：English Presentation type：Poster presentation
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Properties of high power pulsed sputtering with facing targets
Toshihiko MISHIMA, Takashi KIMURA, Kingo AZUMA, Setsuo NAKAO
Event date： 2015.09
Language：Japanese Presentation type：Oral presentation (general)
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Preparation of Ti-DLC and Si-DLC films by reactive HiPIMS
H. Kamata, T. Kimura, S. Nakao, T. Sonoda, T. Kusumori, K. Ozaki, K. Azuma
Event date： 2015.09
Language：Japanese Presentation type：Oral presentation (general)
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Preparation of DLC films by high power pulsed magnetron sputtering with facing targets International conference
TOSHIHIKO MISHIMA, TAKASHI KIMURA, KINGO AZUMA AND SETSUO NAKAO
International Symposium on Advanced Plasma Science and its Applications
Event date： 2015.03
Language：English Presentation type：Poster presentation
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Deposition of amorphous carbon films by inductively coupled discharges containing hydrocarbon gases International conference
木村高志、西村亮太郎、杉野幸也
International Symposium on Advanced Plasma Science and its Applications
Event date： 2013.01 - 2013.02
Language：English Presentation type：Oral presentation (general)
Venue：Nagoya University
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Global Model of inductively coupled CH4/H2 Plasmas
Takashi Kimura
plasma conference2011 日本応用物理学会、プラズマ核融合学会
Event date： 2011.11
Language：English Presentation type：Poster presentation
Venue：金沢
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Properties of high power pulsed magnetron sputtering plasma for deposition of diamond-like carbon (DLC) films
Takashi Kimura, Ryoutaro Nishimura, Masayasu Iida
Plasma Conference2011 日本応用物理学会，プラズマ核融合学会
Event date： 2011.11
Language：English Presentation type：Poster presentation
Venue：金沢
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Properties of inductively coupled rf Ne/N2 plasmas
Takashi Kimura, Ryoutaro Nishimura
Plasma Conference 2011 日本応用物理学会，プラズマ核融合学会
Event date： 2011.11
Language：English Presentation type：Poster presentation
Venue：金沢
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Deposition of diamond-like carbon films by ｈigh power pulsed magnetron sputtering International conference
Takashi Kimura, Masayasu Iida
International sysmposium on dry process 日本応用物理学会
Event date： 2011.11
Language：English Presentation type：Poster presentation
Venue：京都ガーデンパレスホテル，日本
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パルスマグネトロンスパッタリングによるダイヤモンドライクカ－ボン成膜
木村高志、飯田将康
電気学会プラズマ研究会 電気学会
Event date： 2011.05
Language：Japanese Presentation type：Oral presentation (general)
Venue：富山大学
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Aｒで希釈された誘導性結合反応性プラズマの特性
木村高志
電気学会研究会 電気学会
Event date： 2011.03
Language：Japanese Presentation type：Oral presentation (general)
Venue：東京工業大学
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Properties of high pressure RF He/CH4 discharges International conference
Shotaro Kanzaki, Akinori Oda, Takashi Kimura
International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Event date： 2011.03
Language：English Presentation type：Poster presentation
Venue：名古屋工業大学
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誘導性結合高周波CH4/H2プラズマの実験とグロ-バルモデル
木村高志，春日井宏樹
電気学会プラズマ研究会 電気学会
Event date： 2010.12
Language：Japanese Presentation type：Oral presentation (general)
Venue：東京工業大学
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Properties of inductively coupled rf CH4/H2 discharges International conference
Takashi Kimura, Hiroki Kasugai
気体電子工学国際会議＆反応性プラズマ国際会議
Event date： 2010.10
Language：English Presentation type：Poster presentation
Venue：Paris
