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Affiliation Department |
Department of Electrical and Mechanical Engineering
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Title |
Professor |
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External Link |
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KAMIYA Shoji
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Research Areas
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Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Mechanics of materials and materials
From School
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Tohoku University Faculty of Engineering
- 1984.03
Country：Japan
From Graduate School
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Tohoku University Graduate School, Division of Engineering Doctor's Course
- 1989.03
Country：Japan
External Career
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東北大学工学研究科 准教授
1998.04
Country：Japan
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東北大学工学研究科 講師
1997.04 - 1998.03
Country：Japan
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東北大学工学部 講師
1991.04 - 1997.03
Country：Japan
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東北大学工学部 助手
1988.04 - 1991.03
Country：Japan
Research Career
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Strength evaluation of thin films on the basis of fracture mechanics
(not selected)
Project Year：
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Study on the Fracture Process of Fiber-Reinforced Composite Materials
(not selected)
Project Year：
Papers
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A multidimensional scheme of characterization for performance deterioration behavior of flexible devices under bending deformation Reviewed
Shoji Kamiya, Hayato Izumi, Tomohito Sekine, Nobuyuki Shishido, Hiroko Sugiyama, Yasuko Haga, Takeo Minari, Masaaki Koganemaru, Shizuo Tokito
Thin Solid Films 2019
Authorship：Lead author Language：English Publishing type：Research paper (scientific journal)
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High-Strength Sub-Micrometer Spherical Particles Fabricated by Pulsed Laser Melting in Liquid Reviewed
Mitsuhiko Kondo, NobuyukiShishido, Shoji Kamiya, Atsushi Kubo, Yoshitaka Umeno, Yoshie Ishikawa, Naoto Koshizaki
Particle and Particle Systems Characterization 35 ( 7 ) 1800061 2018.07
Language：English Publishing type：Research paper (scientific journal)
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Electronic imaging of subcritical defect accumulation in single crystal silicon under fatigue loading Reviewed
Shoji Kamiya, Akira Kongo, Hiroko Sugiyama, Hayato Izumi
Sensors and Actuators A: Physical 279 705 - 711 2018
Language：English Publishing type：Research paper (scientific journal)
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World-first electronic imaging of subcritical slip glowth in single crystal silicon under fatigue lopading
Shoji Kamiya, Akira Kongo, Hiroko Sugiyama, Hayato Izumi
The 19th international conference on solid-state sensors, actuators, and microsystems 1229 - 1232 2017.06
Language：English Publishing type：Research paper (international conference proceedings)
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Shear stress enhanced fatigue damage accumulation in single crystalline silicon under cyclic mechanical loading Reviewed International journal
Shoji Kamiya, Arasu Udhayakumar, Hayato Izumi, Kozo Koiwa
Sensors and Actuators A: Physical 2016.04
Authorship：Lead author Language：English Publishing type：Research paper (scientific journal)
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Investigation of continuous deformation behavior around initial yeild point of single crystal copper by using micro scale torsion test Reviewed International journal
Koiwa Kozo, Nobuyuki Shishido, Chuantong Chen, Masaki Omiya, Shoji Kamiya, Hisashi Sato, Masahiro Nishida, Tkashi Suzuki, Tomoji Nakamura, Toshiaki Suzuki, Takeshi Nokuo
Scripta Materialia 111 94 - 97 2016.01
Authorship：Lead author Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier
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Shear stress with hydrogen, not oxygen, matters to the fatigue lifetime of silicon International journal
S. Kamiya, A. Udhayakumar, H. Izumi, K. Koiwa
Proceedings of Transducers 2015, Anchorage, Alaska 2015.06
Authorship：Lead author Language：English Publishing type：Research paper (international conference proceedings)
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Evaluation of adhesion energy and its correlation to apparent strength for Cu/SiN interface in copper damascene interconnect structures International journal
S. Kamiya, C. Chen, N. Shishido, M. Omiya, K. Koiwa, H. Sato, M. Nishida, T. Suzuki, T. Nakamura, T. Nokuo, T. Suzuki
Proceedings of IEEE 2015 International Interconnect Tehcnology Conference/Materials for Advanced Metallization Conference 2015.05
Authorship：Lead author Language：English Publishing type：Research paper (international conference proceedings)
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Scenario for catastrophic failure in interconnect structures under chip packaging interaction Reviewed International journal
Masaki Omiya, Shoji Kamiya, Nobuyuki Shishido, Kozo Koiwa, Hisashi Sato, Masahiro Nishida
Proceedings of IEEE International Reliability Physics Symposium 5C.3.1 - 5C.3.5 2015.04
Language：English Publishing type：Research paper (international conference proceedings)
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Hydrogen enhanced on mechanical fatigue in single crystal silicon Reviewed
142 130 - 132 2014.11
Language：English Publishing type：Research paper (scientific journal)
Presentations
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き裂進展シミュレーションによるLSIのCu/SiN界面付着強度に対する銅の結晶粒構造の影響の評価
なむすらいまんだふぞる、小岩康三、大宮正毅、宍戸信之、神谷庄司、佐藤尚、西田政弘、鈴木貴志、中村友二、鈴木俊明、野久尾毅
日本機械学会東海支部第６２期総会講演会
Event date： 2013.03
Language：Japanese Presentation type：Oral presentation (general)
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電子線誘起電流を用いた圧縮応力下におけるシリコンの疲労損傷の観察
喜多俊文、神谷庄司、泉隼人、梅原のりつぐ、ところやま貴行、小川将史
日本機械学会東海支部第６２期総会講演会
Event date： 2013.03
Language：Japanese Presentation type：Oral presentation (general)
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半導体デバイス配線中のCu／SiN界面局所付着強度に及ぼす銅の結晶方位の影響
大浦由香、杉山祐子、宍戸信之、神谷庄司、佐藤尚、小岩康三、西田政弘、大宮正毅、鈴木貴志、中村友二、鈴木俊明、野久尾毅
日本機械学会東海支部第６２期総会講演会
Event date： 2013.03
Language：Japanese Presentation type：Oral presentation (general)
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配線銅／保護層界面剥離試験中の銅結晶粒構造その場観察による界面付着強度と局所変形との相関評価 International conference
松瀬優や、宍戸信之、神谷庄司、佐藤尚、杉山祐子、小岩康三、西田政弘、大宮正毅、鈴木貴志、中村友二、鈴木俊明、野久尾毅
日本機械学会東海支部第６２期総会講演会
Event date： 2013.03
Language：Japanese Presentation type：Oral presentation (general)
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単結晶シリコンの塑性特性における吸蔵水素の影響 International conference
向山諒汰、泉隼人、宍戸信之、神谷庄司
日本機械学会東海支部第６２期総会講演会
Event date： 2013.03
Language：Japanese Presentation type：Oral presentation (general)
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Crystal orientation effect on local adhesion strength of the interface between a damascene copper line and the insulation layer International conference
Nobuyuki Shishido, Yuka Oura, Hisashi Sato, Shoji Kamiya, Kozo Koiwa, Masaki Omiya, Masahiro Nishida, Takashi Suzuki, Tomoji Nakamura, Takeshi Nokuo, Toshiaki Suzuki
Materials for Advanced Metallization
Event date： 2013.03
Language：English Presentation type：Oral presentation (general)
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Evaluation for interface strength fluctuations induced by inhomogeneous grain structure of Cu line in LSI Interconnects International conference
Chuantong Chen, Nobuyuki Shishido, Shoji Kamiya, Kozo Koiwa, Hisashi Sato, Masaki Omiya, Masahiro Nishida, Takashi Suzuki, Tomoji Nakamura, Takeshi Nokuo, Toshiaki Suzuki
Materials for Advanced Metallization 2013
Event date： 2013.03
Language：English Presentation type：Oral presentation (general)
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Development of interfacial crack extension simulation between coper and insulation layer with multi-grain structure International conference
Kozo Koiwa, Masaki Omiya, Nobuyuki Shishido, Shoji Kamiya, Hisashi Sato, Masahiro Nishida, Takashi Suzuki, Tomoji Nakamura, Toshiaki Suzuki, Takeshi Nokuo
Mateirals for Advanced Metallization 2013
Event date： 2013.03
Language：English Presentation type：Oral presentation (general)
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サブミクロンスケールの局所強度評価 International conference
大宮正毅
テクニカルショウヨコハマ２０１３
Event date： 2013.02
Language：Japanese Presentation type：Poster presentation
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LSI配線構造中のCu／絶縁膜界面の結晶粒レベル局所強度に対応するサブミクロン機械工学への挑戦
神谷庄司、佐藤尚、大宮正毅、宍戸信之、小岩康三、西田政弘、中村友二、鈴木貴志、野久尾毅、鈴木俊明
第１５５回研究集会「配線・実装技術と関連材料技術」
Event date： 2013.02
Language：Japanese Presentation type：Oral presentation (invited, special)
Awards
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日本機械学会機械材料・材料加工部門一般表彰（奨励講演論文部門）
2013.01 日本機械学会
陳傳彤、宍戸信之、小岩康三、神谷庄司、大宮正毅、佐藤尚、西田政弘、鈴木貴志、中村友二、鈴木俊明、野久尾毅
Award type：Award from Japanese society, conference, symposium, etc. Country：Japan
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Presentation award of MAM 2012 (Materials for Advanced Metallization, Grenoble)
2012.03 Organizing committee of MAM 2012
Nobuyuki Shishido, et al.
Award type：Award from international society, conference, symposium, etc. Country：France
Committee Memberships
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日本機械学会 InterPACK 2013 Track Chair
2012.09 - 2013.07
Committee type：Academic society