Presentations -
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溝加工AlN上でのMOVPE法におけるAlN成長速度の異方性
楊 士波，宮川 鈴衣奈，三宅 秀人，平松 和政
第72回応用物理学会学術講演会
Event date： 2011.08 - 2011.09
Language：Japanese Presentation type：Oral presentation (general)
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減圧HVPE法による周期溝加工AlN/a面Sapphire上への厚膜AlN成長
高木 雄太，宮川 鈴衣奈， 三宅 秀人，平松 和政
第72回応用物理学会学術講演会
Event date： 2011.08 - 2011.09
Language：Japanese Presentation type：Oral presentation (general)
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サファイア上へのAlN 成長における界面層の評価と極性制御
宮川 鈴衣奈，三宅 秀人，平松 和政
特定領域研究「窒化物光半導体のフロンティア －材料潜在能力の極限発現－ 最終成果報告公開シンポジウム
Event date： 2011.08
Language：Japanese Presentation type：Poster presentation
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Influence of carrier gas and growth temperature on MOVPE growth of AlN International conference
R. Miyagawa, S. Yang, H. Miyake, K. Hiramatsu
9th International Conference on Nitride Semiconductors
Event date： 2011.07
Language：English Presentation type：Poster presentation
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Fabrication of crack-free thick AlN film on a-plane sapphire by low-pressure HVPE International conference
Yuta Takagi, Reina Miyagawa, Hideto Miyake, Kazumasa Hiramatsu
9th International Conference on Nitride Semiconductors
Event date： 2011.07
Language：English Presentation type：Oral presentation (general)
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Effects of carrier gas and temperature on MOVPE growth of AlN International conference
R. Miyagawa, S. Yang, H. Miyake, K. Hiramatsu
30th Electronic Materials Symposium
Event date： 2011.06 - 2011.07
Language：English Presentation type：Poster presentation
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Fabrication of crack-free thick AlN film on a-plane sapphire by low-pressure HVPE International conference
Yuta Takagi, Reina Miyagawa, Hideto Miyake, Kazumasa Hiramatsu
30th Electronic Materials Symposium
Event date： 2011.06 - 2011.07
Language：English Presentation type：Poster presentation
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Study on interface for AlN growth on sapphire substrate International conference
R. Miyagawa, S. Yang, H. Miyake, K. Hiramatsu
5th Asia-Pacific Workshop on Widegap Semiconductors
Event date： 2011.05
Language：English Presentation type：Poster presentation
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Raman Scattering Spectroscopy of Residual Stresses in Epitaxial AlN films International conference
S. Yang, R. Miyagawa, H. Miyake, K. Hiramatsu, H. Harima
5th Asia-Pacific Workshop on Widegap Semiconductors
Event date： 2011.05
Language：English Presentation type：Poster presentation
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エピタキシャルAlN膜のラマン散乱分光による評価
楊士波，宮川鈴衣奈，三宅秀人，平松和政，播磨弘
電子情報通信学会技術研究報告
Event date： 2011.05
Language：Japanese Presentation type：Oral presentation (general)
