KIMURA Takashi

写真a

Affiliation Department etc.

Department of Physical Science and Engineering
Department of Physical Science and Engineering

Title

Associate Professor

Graduating School

  •  
    -
    1987.03

    Nagoya Institute of Technology   Faculty of Engineering   Graduated

Graduate School

  •  
    -
    1989.03

    Nagoya Institute of Technology  Graduate School, Division of Engineering  Master's Course  Completed

Degree

  • Nagoya Institute of Technology -  Doctor (Engineering)

  • Nagoya Institute of Technology -  Master of Engineering

Academic Society Affiliations

  •  
     
     

    The Society of Instrument and Control Engineers

  •  
     
     

    The Instituteof Electrical Engineers of Japan

  •  
     
     

    The Japan Society of Applied Physics

Field of expertise (Grants-in-aid for Scientific Research classification)

  • Plasma science

 

Research Career

  • Study on application of atmospheric pressure discharges

    (not selected)  

    Project Year:   - 

  • Design of low pressure plasmas for materials processing

    (not selected)  

    Project Year:   - 

Papers

  • Deposition of Fluorinated Diamond-Like-Carbon Films by Exposure of Electrothermal Pulsed Plasmas

    Takashi Kimura, Masayasu Iida

    Japanese Journal of Applied Physics   50 ( 08 ) JD04   2011.08  [Refereed]

    Research paper (scientific journal)   Multiple Authorship

  • Experiments and global model of inductively coupled rf Ar/N2 discharges

    Takashi Kimura, Hiroki Kasugai

    Journal of Applied Physics   108   033305-1 - 033305-9   2010.08  [Refereed]

    Research paper (scientific journal)   Multiple Authorship

  • Properties of inductively-coupled RF Ar/H2 plasmas :experiment and global model

    Takashi Kimura, Hiroki Kasugai

    Journal of Applied Physics   107   83308   2010.04  [Refereed]

    Research paper (scientific journal)   Multiple Authorship

  • Comparison of plasma parameters measured in inductively coupled Ar/C4F8/O2 and Ar/CF4/O2 plasmas

    T Kimura and K Hanaki

    Japanese Journal of Applied Physics   48 ( 9 ) 96004   2009.09  [Refereed]

    Research paper (scientific journal)   Multiple Authorship

  • Experimental study on properties of radio frequency He/CF4/O2 discharges at atmospheric pressure

    T. Kimura and H Tanahashi

    Plasma Sources Science and Technology   18 ( 2 ) 25002   2009.05  [Refereed]

    Research paper (scientific journal)   Multiple Authorship

  • Experiments and global model analysis of inductively coupled CF4/O2/Ar plasmas

    T Kimura and K Hanaki

    Japanese Journal of Applied Physics   47 ( 11 ) 8537 - 8545   2008.11  [Refereed]

    Research paper (scientific journal)   Multiple Authorship

  • Probe measurements and optical emission spectroscopy in inductively coupled Ar/CF4, Ar/NF3 and Ar/SF6 discharges

    T Kimura and K Hanaki

    Japanese Journal of Applied Physics   47 ( 11 ) 8546 - 8552   2008.11  [Refereed]

    Research paper (scientific journal)   Multiple Authorship

  • Experimental study on inductively coupled RF CF4/O2/Ar discharges

    T.Kimura, K.Hanaki and S.Shimagami

    Proceedings of 18th International Symposium on Plasma Chemistry (CD ROM)     110   2007.08  [Refereed]

    Research paper (international conference proceedings)   Multiple Authorship

  • Experimental study on atmospheric pressure RF capacitive He/CF4,He/C2F6 and He/SF6 discharges

    T.Kimura, H.Tanahashi, T.Mori

    Proceedings of 18th International Symposium on Plasma Chemistry (CD ROM)     167   2007.08  [Refereed]

    Research paper (international conference proceedings)   Multiple Authorship

  • Experimental study of capacitive He/O2 discharges at atmospheric pressure

    T Kimura and T Hanai

    Japanese Journal of Applied Physics   45 ( 5 ) 4219 - 4221   2006.04  [Refereed]

    Research paper (scientific journal)   Multiple Authorship

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Presentations

  • Preparation of DLC films by high power pulsed magnetron sputtering with facing targets

    TOSHIHIKO MISHIMA, TAKASHI KIMURA, KINGO AZUMA AND SETSUO NAKAO

    International Symposium on Advanced Plasma Science and its Applications  (Nagoya University)  2015.03  -  2015.03  The Japan Society of Applied Physics

  • Global Model of inductively coupled CH4/H2 Plasmas

    Takashi Kimura

    plasma conference2011  (金沢)  2011.11  -  2011.11  日本応用物理学会、プラズマ核融合学会

  • Properties of high power pulsed magnetron sputtering plasma for deposition of diamond-like carbon (DLC) films

    Takashi Kimura, Ryoutaro Nishimura, Masayasu Iida

    Plasma Conference2011  (金沢)  2011.11  -  2011.11  日本応用物理学会,プラズマ核融合学会

  • Properties of inductively coupled rf Ne/N2 plasmas

    Takashi Kimura, Ryoutaro Nishimura

    Plasma Conference 2011  (金沢)  2011.11  -  2011.11  日本応用物理学会,プラズマ核融合学会

  • Deposition of diamond-like carbon films by high power pulsed magnetron sputtering

    Takashi Kimura, Masayasu Iida

    International sysmposium on dry process  (京都ガーデンパレスホテル,日本)  2011.11  -  2011.11  日本応用物理学会

  • Properties of high pressure RF He/CH4 discharges

    Shotaro Kanzaki, Akinori Oda, Takashi Kimura

    International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials   (名古屋工業大学)  2011.03  -  2011.03 

  • Properties of inductively coupled rf CH4/H2 discharges

    Takashi Kimura, Hiroki Kasugai

    気体電子工学国際会議&反応性プラズマ国際会議  (Paris)  2010.10  -  2010.10 

  • Deposition of fluorinated diamond-like carbon films using pulsed plasma thruster

    Takashi Kimura, Masayasu Iida

    気体電子工学国際会議&反応性プラズマ国際会議  (Paris)  2010.10  -  2010.10 

 
 

Academic Activity

  • 1999.04
    -
    2001.03

    The Japan Society of Applied Physics