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Affiliation Department etc. |
Department of Physical Science and Engineering
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Title |
Associate Professor |
KIMURA Takashi
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Graduating School
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-1987.03
Nagoya Institute of Technology Faculty of Engineering Graduated
Graduate School
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-1989.03
Nagoya Institute of Technology Graduate School, Division of Engineering Master's Course Completed
Degree
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Nagoya Institute of Technology - Doctor (Engineering)
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Nagoya Institute of Technology - Master of Engineering
Academic Society Affiliations
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The Society of Instrument and Control Engineers
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The Instituteof Electrical Engineers of Japan
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The Japan Society of Applied Physics
Field of expertise (Grants-in-aid for Scientific Research classification)
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Plasma science
Research Career
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Study on application of atmospheric pressure discharges
(not selected)
Project Year： -
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Design of low pressure plasmas for materials processing
(not selected)
Project Year： -
Papers
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Deposition of Fluorinated Diamond-Like-Carbon Films by Exposure of Electrothermal Pulsed Plasmas
Takashi Kimura, Masayasu Iida
Japanese Journal of Applied Physics 50 ( 08 ) JD04 2011.08 [Refereed]
Research paper (scientific journal) Multiple Authorship
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Experiments and global model of inductively coupled rf Ar/N2 discharges
Takashi Kimura, Hiroki Kasugai
Journal of Applied Physics 108 033305-1 - 033305-9 2010.08 [Refereed]
Research paper (scientific journal) Multiple Authorship
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Properties of inductively-coupled RF Ar/H2 plasmas :experiment and global model
Takashi Kimura, Hiroki Kasugai
Journal of Applied Physics 107 83308 2010.04 [Refereed]
Research paper (scientific journal) Multiple Authorship
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Comparison of plasma parameters measured in inductively coupled Ar/C4F8/O2 and Ar/CF4/O2 plasmas
T Kimura and K Hanaki
Japanese Journal of Applied Physics 48 ( 9 ) 96004 2009.09 [Refereed]
Research paper (scientific journal) Multiple Authorship
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Experimental study on properties of radio frequency He/CF4/O2 discharges at atmospheric pressure
T. Kimura and H Tanahashi
Plasma Sources Science and Technology 18 ( 2 ) 25002 2009.05 [Refereed]
Research paper (scientific journal) Multiple Authorship
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Experiments and global model analysis of inductively coupled CF4/O2/Ar plasmas
T Kimura and K Hanaki
Japanese Journal of Applied Physics 47 ( 11 ) 8537 - 8545 2008.11 [Refereed]
Research paper (scientific journal) Multiple Authorship
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Probe measurements and optical emission spectroscopy in inductively coupled Ar/CF4, Ar/NF3 and Ar/SF6 discharges
T Kimura and K Hanaki
Japanese Journal of Applied Physics 47 ( 11 ) 8546 - 8552 2008.11 [Refereed]
Research paper (scientific journal) Multiple Authorship
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Experimental study on inductively coupled RF CF4/O2/Ar discharges
T.Kimura, K.Hanaki and S.Shimagami
Proceedings of 18th International Symposium on Plasma Chemistry (CD ROM) 110 2007.08 [Refereed]
Research paper (international conference proceedings) Multiple Authorship
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Experimental study on atmospheric pressure RF capacitive He/CF4,He/C2F6 and He/SF6 discharges
T.Kimura, H.Tanahashi, T.Mori
Proceedings of 18th International Symposium on Plasma Chemistry (CD ROM) 167 2007.08 [Refereed]
Research paper (international conference proceedings) Multiple Authorship
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Experimental study of capacitive He/O2 discharges at atmospheric pressure
T Kimura and T Hanai
Japanese Journal of Applied Physics 45 ( 5 ) 4219 - 4221 2006.04 [Refereed]
Research paper (scientific journal) Multiple Authorship
Presentations
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Preparation of DLC films by high power pulsed magnetron sputtering with facing targets
TOSHIHIKO MISHIMA, TAKASHI KIMURA, KINGO AZUMA AND SETSUO NAKAO
International Symposium on Advanced Plasma Science and its Applications (Nagoya University) 2015.03 - 2015.03 The Japan Society of Applied Physics
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Global Model of inductively coupled CH4/H2 Plasmas
Takashi Kimura
plasma conference2011 (金沢) 2011.11 - 2011.11 日本応用物理学会、プラズマ核融合学会
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Properties of high power pulsed magnetron sputtering plasma for deposition of diamond-like carbon (DLC) films
Takashi Kimura, Ryoutaro Nishimura, Masayasu Iida
Plasma Conference2011 (金沢) 2011.11 - 2011.11 日本応用物理学会，プラズマ核融合学会
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Properties of inductively coupled rf Ne/N2 plasmas
Takashi Kimura, Ryoutaro Nishimura
Plasma Conference 2011 (金沢) 2011.11 - 2011.11 日本応用物理学会，プラズマ核融合学会
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Deposition of diamond-like carbon films by ｈigh power pulsed magnetron sputtering
Takashi Kimura, Masayasu Iida
International sysmposium on dry process (京都ガーデンパレスホテル，日本) 2011.11 - 2011.11 日本応用物理学会
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Properties of high pressure RF He/CH4 discharges
Shotaro Kanzaki, Akinori Oda, Takashi Kimura
International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (名古屋工業大学) 2011.03 - 2011.03
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Properties of inductively coupled rf CH4/H2 discharges
Takashi Kimura, Hiroki Kasugai
気体電子工学国際会議＆反応性プラズマ国際会議 (Paris) 2010.10 - 2010.10
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Deposition of fluorinated diamond-like carbon films using pulsed plasma thruster
Takashi Kimura, Masayasu Iida
気体電子工学国際会議＆反応性プラズマ国際会議 (Paris) 2010.10 - 2010.10